| |
|
EG2001X |
|
NXG |
| Accuracy |
|
Within 12 Microns / 0.5 mil (± microns) |
|
Within 6 micons / ± 3 |
| Wafer Size |
|
3,4,5 and 6 inch |
|
3,4,5,6 ( 8 and 12 inch coming soon ) |
| Maximum X/Y Speed |
|
250 mm (10") sec. |
|
250 mm (10") sec. |
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|
| Z Stage / Chuck |
|
|
|
|
| Range |
|
0.200" |
|
0.200" (other configurations available) |
| Speed |
|
15 ms / 0.020" stroke |
|
11ms |
| Rotation |
|
± 10° |
|
± 10° ( 180° also available) |
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|
| Loader (wafer handler) |
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|
|
|
| Cassette Capacity |
|
2 Standard; 1 sender, 1 receiver |
|
2 Standard; 1 sender, 1 receiver |
| Wafer Handling |
|
belt and vacuum arm |
|
belt and vacuum arm |
| Fine Alignment |
|
CCD Image Processing |
|
2 mega pixel digital CCD Camera |
| Hard Disk Drive |
|
N/A |
|
60 - 250 gig |
| Floppy Disk Drives |
|
optional 3.5"; 2 drives |
|
USB, Floppy, CD/RW, and DVD writer |
| Display |
|
9" B & W |
|
17" Color LCD |
| Power Consumption |
|
Approx 1.5 KVA |
|
Approx 1.5 KVA |
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|
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|
|
| Facilities Required |
|
|
|
|
| Air |
|
75 PSI @ 3 CFM |
|
75 PSI @ 3 CFM |
| Vacuum |
|
25 in/hg. |
|
25 in/hg. |
| Dimensions |
|
48"w x 32"d x 60"h (standard) |
|
48"w x 32"d x 60"h (standard) |
| Weight |
|
800 lbs. |
|
700lbs. |
